Microscopic Vibration Countermeasure
06 Aug, 2018 / 1183 Views
Category: relating to "Cleanroom Technologies"
Cleanroom Technologies
Category: relating to "Cleanroom Technologies"
Cleanroom Technologies
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Estimated Microscopic Vibration & Countermeasure Technologies / Optimal control of microscopic vibrations, which may affect the yields of products
In precision machinery industries such as the semiconductor industry, it is important to control the vibration of floors during the manufacturing processes, since microscopic vibrations may affect product yields. Countermeasures against microscopic vibrations should involve joint efforts by the building contractor and equipment supplier to meet the customer's requirements. We implement countermeasures based on the following concept.
Our Concept of Vibration Control for Equipment
